SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - AlN driven microcantilever actuators: modeling, fabrication, characterization
Krupa, K.; Gorecki, Christophe; Asundi, Anand K.; Józwik, M.; Andrei, A.; Osten, Wolfgang; Nieradko, Ł.; Gorecki, C.; Delobelle, P.; Hirsinger, L.
- 作者Krupa, K.; Gorecki, Christophe; Asundi, Anand K.; Józwik, M.; Andrei, A.; Osten, Wolfgang; Nieradko, Ł.; Gorecki, C.; Delobelle, P.; Hirsinger, L.
- 卷第6995卷
- 印刷ISSN0277-786X
- 文件大小1531.42KB
- 发表时间2008
- DOI10.1117/12.781262