SPIE Proceedings [SPIE XVII International Symposium on Gas Flow and Chemical Lasers and High Power Lasers - Lisboa, Portugal (Monday 15 September 2008)] XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - A laser-plasma clean soft x-ray source for projection microlithography
Bollanti, S.; Di Lazzaro, P.; Flora, F.; Mezi, L.; Murra, D.; Torre, A.
- 作者Bollanti, S.; Di Lazzaro, P.; Flora, F.; Mezi, L.; Murra, D.; Torre, A.
- 卷第7131卷
- 印刷ISSN0277-786X
- 文件大小1987.98KB
- 发表时间2008
- DOI10.1117/12.816912