Low Temperature Formation of SiO2 Thin Films by Nitric Acid Oxidation of Si and Electrical Characterization of the Film
- 期刊名称Hyomen Kagaku
- 作者MATSUMOTO, Taketoshi; IMAMURA, Kentaro; KOBAYASHI, Hikaru
- 卷第29卷
- 期第8期
- 印刷ISSN0388-5321
- 电子ISSN1881-4743
- 文件大小390.81KB
- 发表时间2008
- DOI10.1380/jsssj.29.498
- 页码498-502
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