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Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

Clarence L. Chang; John E. Carlstrom; Aaron Datesman; Stephan S. Meyer; Valentyn Novosad; Volodymyr G. Yefremenko; Tom Crawford; Tom Downes; Jeff McMahon; Kathryn Miknaitis; Joaquin D. Vieira
  • 作者Clarence L. Chang; John E. Carlstrom; Aaron Datesman; Stephan S. Meyer; Valentyn Novosad; Volodymyr G. Yefremenko; Tom Crawford; Tom Downes; Jeff McMahon; Kathryn Miknaitis; Joaquin D. Vieira
  • 卷第151卷
  • 印刷ISSN0022-2291
  • 电子ISSN1573-7357
  • 文件大小325.51KB
  • 发表时间2008-04
  • DOI10.1007/s10909-007-9639-8
  • 页码245-248
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