Alumina MEMS platform for impulse semiconductor and IR optic gas sensors

A.A. Vasiliev; R.G. Pavelko; S. Yu. Gogish-Klushin; D. Yu. Kharitonov; O.S. Gogish-Klushina; A.V. Sokolov; A.V. Pisliakov; N.N. Samotaev

作者A.A. Vasiliev; R.G. Pavelko; S. Yu. Gogish-Klushin; D. Yu. Kharitonov; O.S. Gogish-Klushina; A.V. Sokolov; A.V. Pisliakov; N.N. Samotaev
卷第132卷
期第1期
印刷ISSN0925-4005
文件大小1022.35KB
发表时间2008
DOI10.1016/j.snb.2008.01.043
页码216-223

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