Properties of argon/oxygen mixture plasmas driven by multiple internal-antenna units

• 作者Yuichi Setsuhara; Kosuke Takenaka; Akinori Ebe; Jeon G. Han
• 卷第202卷
• 印刷ISSN0257-8972
• 文件大小427.98KB
• 发表时间2008
• DOI10.1016/j.surfcoat.2008.06.002
• 页码5230-5233