Measuring stresses in thin metal films by means of Raman microscopy using silicon as a strain gage material
- 作者Thomas Wermelinger; Christophe Charpentier; Müge Deniz Yüksek; Ralph Spolenak
- 卷第40卷
- 期第12期
- 印刷ISSN0377-0486
- 电子ISSN1097-4555
- 文件大小532.69KB
- 发表时间2009
- DOI10.1002/jrs.2332
- 页码1849-1857
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