Plasma enhanced diamond deposition on steel and Si substrates
Y.S. Li; Y. Tang; W. Chen; Q. Yang; C. Xiao; A. Hirose
- 作者Y.S. Li; Y. Tang; W. Chen; Q. Yang; C. Xiao; A. Hirose
- 卷第22卷
- 期第5期
- 印刷ISSN1006-7191
- 文件大小1071.19KB
- 发表时间2009
- DOI10.1016/s1006-7191(08)60105-2