Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering
Huafu, Zhang; Chengxin, Lei; Hanfa, Liu; Changkun, Yuan
- 期刊名称Journal of Semiconductors
- 作者Huafu, Zhang; Chengxin, Lei; Hanfa, Liu; Changkun, Yuan
- 卷第30卷
- 期第4期
- 印刷ISSN1674-4926
- 文件大小232.31KB
- 发表时间2009-04
- DOI10.1088/1674-4926/30/4/043004