[IEEE 2009 IEEE International Reliability Physics Symposium (IRPS) - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - Systematic study of the relationship between 1/ƒ noise, interface state defects and mobility ddgradtion of high-K /metal CMOSFETs on (110) and (100) substrate
Sato, Motoyuki; Aoyama, Takayuki; Nara, Yasuo; Ohji, Yuzuru
- 作者Sato, Motoyuki; Aoyama, Takayuki; Nara, Yasuo; Ohji, Yuzuru
- 文件大小543.14KB
- 发表时间2009
- DOI10.1109/irps.2009.5173222
- 页码45-50