A UV curable resin with reworkable properties: application to imprint lithography
- 期刊名称Journal of Materials Chemistry
- 作者Matsukawa, Daisaku; Wakayama, Hiroyuki; Mitsukura, Kazuyuki; Okamura, Haruyuki; Hirai, Yoshihiko; Shirai, Masamitsu
- 卷第19卷
- 期第24期
- 印刷ISSN0959-9428
- 电子ISSN1364-5501
- 文件大小1002.89KB
- 发表时间2009
- DOI10.1039/b905188k