[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Improved adhesion between C-MEMS and substrate by micromechanical interlocking

Jie Gong, ; Zirong Tang, ; Tielin Shi, ; Guanglan Liao, ; Lei Nie, ; Shiyuan Liu,

作者Jie Gong, ; Zirong Tang, ; Tielin Shi, ; Guanglan Liao, ; Lei Nie, ; Shiyuan Liu,
文件大小5690.97KB
发表时间2009
DOI10.1109/nems.2009.5068658
页码624-627

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