EUV laser produced plasma source development
Nigel R. Farrar; David C. Brandt; Igor V. Fomenkov; Alex I. Ershov; Norbert R. Bowering; William N. Partlo; David W. Myers; Alexander N. Bykanov; Georgiy O. Vaschenko; Oleh V. Khodykin; Jerzy R. Hoffman; Christopher P. Chrobak
- 作者Nigel R. Farrar; David C. Brandt; Igor V. Fomenkov; Alex I. Ershov; Norbert R. Bowering; William N. Partlo; David W. Myers; Alexander N. Bykanov; Georgiy O. Vaschenko; Oleh V. Khodykin; Jerzy R. Hoffman; Christopher P. Chrobak
- 卷第86卷
- 印刷ISSN0167-9317
- 文件大小404.84KB
- 发表时间2009
- DOI10.1016/j.mee.2008.10.020
- 页码509-512