Patterning of LiNbO3 by means of ion irradiation using the electronic energy deposition and wet etching

• 作者Th. Gischkat; H. Hartung; F. Schrempel; E.B. Kley; A. Tünnermann; W. Wesch
• 卷第86卷
• 印刷ISSN0167-9317
• 文件大小183.23KB
• 发表时间2009
• DOI10.1016/j.mee.2008.11.031
• 页码910-912