The Effect of Silicon Nitride Stoichiometry on Charging Mechanisms in RF-MEMS Capacitive Switches

Tavassolian, N.; Koutsoureli, M.; Papandreou, E.; Papaioannou, G.; Lacroix, B.; Liu, Z.; Papapolymerou, J.

期刊名称IEEE Transactions on Microwave Theory and Techniques
作者Tavassolian, N.; Koutsoureli, M.; Papandreou, E.; Papaioannou, G.; Lacroix, B.; Liu, Z.; Papapolymerou, J.
卷第57卷
期第12期
印刷ISSN0018-9480
电子ISSN1557-9670
文件大小757.32KB
发表时间2009-12
DOI10.1109/tmtt.2009.2033865
页码3518-3524

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