发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Simulation of the velocity distribution for immersion lithography

[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Simulation of the velocity distribution for immersion lithography

Hui Chen, ; WenYu Chen, ; Zou, Jun; Ruan, XiaoDong; Xin Fu,

作者Hui Chen, ; WenYu Chen, ; Zou, Jun; Ruan, XiaoDong; Xin Fu,
文件大小486.98KB
发表时间2009
DOI10.1109/aim.2009.5229846
页码1566-1571

← 返回【学霸图书馆】主页