Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges
Donkó, Z.; Schulze, J.; Czarnetzki, U.; Luggenhölscher, D.
- 期刊名称Applied Physics Letters
- 作者Donkó, Z.; Schulze, J.; Czarnetzki, U.; Luggenhölscher, D.
- 卷第94卷
- 期第13期
- 印刷ISSN0003-6951
- 文件大小539.38KB
- 发表时间2009
- DOI10.1063/1.3110056