[IEEE 2009 International Conference on Mechatronics and Automation (ICMA) - Changchun, China (2009.08.9-2009.08.12)] 2009 International Conference on Mechatronics and Automation - Quality inspection of nanoscale patterns produced by Laser Interference Lithography using image analysis techniques

Ji, Ze; Zhang, Jin; Changsi Peng, ; Chunlei Tan, ; Olaizola, Santiago M.; Berthou, Thierry; Tisserand, Stephane; Verevkin, Yury K.; Wang, Zuobin

作者Ji, Ze; Zhang, Jin; Changsi Peng, ; Chunlei Tan, ; Olaizola, Santiago M.; Berthou, Thierry; Tisserand, Stephane; Verevkin, Yury K.; Wang, Zuobin
文件大小1726.11KB
发表时间2009
DOI10.1109/icma.2009.5246458
页码1835-1840

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