Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors
- 作者M.M. Dahl; A. Bellou; D.F. Bahr; M.G. Norton; E.W. Osborne
- 卷第311卷
- 期第6期
- 印刷ISSN0022-0248
- 文件大小895.01KB
- 发表时间2009
- DOI10.1016/j.jcrysgro.2009.01.114
- 页码1496-1500
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