Snapshot Mask-less fabrication of embedded monolithic SU-8 microstructures with arbitrary topologies
- 作者P. Preechaburana; D. Filippini
- 卷第1卷
- 期第1期
- 印刷ISSN1876-6196
- 文件大小370.20KB
- 发表时间2009
- DOI10.1016/j.proche.2009.07.194
- 页码778-781
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