Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F
<sub/>2</sub><sup>-</sup>
lasers

Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F ₂^- lasers

Basiev, Tasoltan T; Karasik, Aleksandr Ya; Osiko, Vyacheslav V; Papashvili, A G; Chunaev, D S; Gavrilov, A V; Ershkov, M N; Smetanin, S N; Solokhin, S A; Fedin, A V; Kolokol'tsev, V N; Lazorenko, V M; Tovtin, V I

期刊名称Quantum Electronics
作者Basiev, Tasoltan T; Karasik, Aleksandr Ya; Osiko, Vyacheslav V; Papashvili, A G; Chunaev, D S; Gavrilov, A V; Ershkov, M N; Smetanin, S N; Solokhin, S A; Fedin, A V; Kolokol'tsev, V N; Lazorenko, V M; Tovtin, V I
卷第39卷
期第4期
印刷ISSN1063-7818
电子ISSN1468-4799
文件大小206.50KB
发表时间2009-04-30
DOI10.1070/QE2009v039n04ABEH013909
页码385-387

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Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F 2- lasers

Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F ₂^- lasers