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Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/Si and C/Si multilayers

Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/Si and C/Si multilayers

C.K. Chung; B.H. Wu; T.S. Chen; C.C. Peng; C.W. Lai

作者C.K. Chung; B.H. Wu; T.S. Chen; C.C. Peng; C.W. Lai
卷第517卷
期第20期
印刷ISSN0040-6090
文件大小410.96KB
发表时间2009
DOI10.1016/j.tsf.2007.06.226
页码5867-5871

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