Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass
- 作者Hisao Makino; Aki Miyake; Takahiro Yamada; Naoki Yamamoto; Tetsuya Yamamoto
- 卷第517卷
- 期第10期
- 印刷ISSN0040-6090
- 文件大小682.09KB
- 发表时间2009
- DOI10.1016/j.tsf.2008.11.088
- 页码3138-3142
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