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Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique

Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique

Goh Boon Tong; Siti Meriam Ab. Gani; Muhamad Rasat Muhamad; Saadah Abdul Rahman
  • 作者Goh Boon Tong; Siti Meriam Ab. Gani; Muhamad Rasat Muhamad; Saadah Abdul Rahman
  • 卷第517卷
  • 期第17期
  • 印刷ISSN0040-6090
  • 文件大小507.31KB
  • 发表时间2009
  • DOI10.1016/j.tsf.2009.03.066
  • 页码4945-4949
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