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Effects of total gas flow rate and sputtering power on the critical condition for target mode transition in Al–O2 reactive sputtering

Effects of total gas flow rate and sputtering power on the critical condition for target mode transition in Al–O2 reactive sputtering

Y. Chiba; Y. Abe; M. Kawamura; K. Sasaki

作者Y. Chiba; Y. Abe; M. Kawamura; K. Sasaki
卷第84卷
期第5期
印刷ISSN0042-207X
文件大小338.23KB
发表时间2009
DOI10.1016/j.vacuum.2009.06.024
页码629-632

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