[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - A Study Of Gate-All-Around Transistors By Electron Tomography

Cherns, P. D.; Lorut, F.; Beçu, S.; Dupré, C.; Tachi, K.; Cooper, D.; Chabli, A.; Ernst, T.; Secula, Erik M.; Seiler, David G.; Khosla, Rajinder P.; Herr, Dan; Michael Garner, C.; McDonald, Robert; Diebold, Alain C.

作者Cherns, P. D.; Lorut, F.; Beçu, S.; Dupré, C.; Tachi, K.; Cooper, D.; Chabli, A.; Ernst, T.; Secula, Erik M.; Seiler, David G.; Khosla, Rajinder P.; Herr, Dan; Michael Garner, C.; McDonald, Robert; Diebold, Alain C.
文件大小1880.42KB
发表时间2009
DOI10.1063/1.3251236
页码290-293

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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - A Study Of Gate-All-Around Transistors By Electron Tomography