Controlled thinning and surface smoothening of silicon nanopillars
- 期刊名称Nanotechnology
- 作者Kalem, S; Werner, P; Nilsson, B; Talalaev, V G; Hagberg, M; Arthursson, Ö; Södervall, U
- 卷第20卷
- 期第44期
- 印刷ISSN0957-4484
- 电子ISSN1361-6528
- 文件大小1565.01KB
- 发表时间2009-11-04
- DOI10.1088/0957-4484/20/44/445303
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