SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, CA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Clustering and pattern matching for an automatic hotspot classification and detection system
Ghan, Justin; Ma, Ning; Mishra, Sandipan; Spanos, Costas; Poolla, Kameshwar; Rodriguez, Norma; Capodieci, Luigi; Singh, Vivek K.; Rieger, Michael L.
- 作者Ghan, Justin; Ma, Ning; Mishra, Sandipan; Spanos, Costas; Poolla, Kameshwar; Rodriguez, Norma; Capodieci, Luigi; Singh, Vivek K.; Rieger, Michael L.
- 卷第7275卷
- 印刷ISSN0277-786X
- 文件大小326.66KB
- 发表时间2009
- DOI10.1117/12.814328