SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Enabling accurate gate profile control with inline 3D-AFM
- 作者Bao, Tianming; Postek, Michael T.; Lopez, Andrew; Newbury, Dale E.; Platek, S. Frank; Dawson, Dean; Joy, David C.
- 卷第7378卷
- 印刷ISSN0277-786X
- 文件大小712.27KB
- 发表时间2009
- DOI10.1117/12.824203
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