SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Assistance system for optical sensors
- 作者Schmitt, R.; Bosse, Harald; Bodermann, Bernd; Koerfer, F.; Seewig, J.; Silver, Richard M.; Osten, W.; Weckenmann, A.
- 卷第7390卷
- 印刷ISSN0277-786X
- 文件大小1005.58KB
- 发表时间2009
- DOI10.1117/12.827339
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