Guest Editorial: Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Hartzell, Allyson L.
- 卷第8卷
- 期第3期
- 印刷ISSN1932-5150
- 文件大小26.11KB
- 发表时间2009-07-01
- DOI10.1117/1.3236753
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