Synthesis of a fluorinated photoresist for optical waveguide devices
- 作者Xu Fei; Ying Wan; Haiming Zhang; Zhanchen Cui; Daming Zhang
- 卷第96卷
- 期第2期
- 印刷ISSN0947-8396
- 电子ISSN1432-0630
- 文件大小437.42KB
- 发表时间2009-08
- DOI10.1007/s00339-009-5280-5
- 页码467-472
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