MEMS-based gas flow sensors
Yu-Hsiang Wang; Chang-Pen Chen; Chih-Ming Chang; Chia-Pin Lin; Che-Hsin Lin; Lung-Ming Fu; Chia-Yen Lee
- 作者Yu-Hsiang Wang; Chang-Pen Chen; Chih-Ming Chang; Chia-Pin Lin; Che-Hsin Lin; Lung-Ming Fu; Chia-Yen Lee
- 卷第6卷
- 期第3期
- 印刷ISSN1613-4982
- 电子ISSN1613-4990
- 文件大小865.37KB
- 发表时间2009-03
- DOI10.1007/s10404-008-0383-4
- 页码333-346