Uniform design and regression analysis of LPCVD boron carbide from BCl3–CH4–H2 system

• 作者Yongsheng Liu; Litong Zhang; Laifei Cheng; Qingfeng Zeng; Weihua Zhang; Wenbin Yang; Zude Feng; Siwei Li; Bin Zeng
• 卷第255卷
• 期第11期
• 印刷ISSN0169-4332
• 文件大小1165.55KB
• 发表时间2009
• DOI10.1016/j.apsusc.2008.12.075
• 页码5729-5735