Miniaturised multi-MEMS sensor development
Mathieu Hautefeuille; Brendan O’Flynn; Frank Peters; Conor O’Mahony
- 作者Mathieu Hautefeuille; Brendan O’Flynn; Frank Peters; Conor O’Mahony
- 卷第49卷
- 期第6期
- 印刷ISSN0026-2714
- 文件大小657.39KB
- 发表时间2009
- DOI10.1016/j.microrel.2009.02.017
- 页码621-626