Investigations of electron beam induced conductivity in silicon oxide thin films
- 作者S. S. Borisov; P. S. Vergeles; E. B. Yakimov
- 卷第4卷
- 期第5期
- 印刷ISSN1027-4510
- 电子ISSN1819-7094
- 文件大小152.36KB
- 发表时间2010-10
- DOI10.1134/s1027451010050095
- 页码754-757
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