Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm)

• 作者V. M. Borisov; G. N. Borisova; A. Yu. Vinokhodov; A. S. Ivanov; Yu. B. Kiryukhin; V. A. Mishchenko; A. V. Prokofiev; O. B. Khristoforov
• 卷第36卷
• 期第3期
• 印刷ISSN1063-780X
• 电子ISSN1562-6938
• 文件大小442.58KB
• 发表时间2010-03
• DOI10.1134/s1063780x10030037
• 页码216-225