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Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Schleunitz, Arne; Schift, Helmut

作者Schleunitz, Arne; Schift, Helmut
卷第20卷
期第9期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小592.21KB
发表时间2010
DOI10.1088/0960-1317/20/9/095002

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