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Dependence of melting, roughness and contact resistances on Ge and Ni content in alloyed AuGe/Ni/Au-type electrical contacts to GaAs/AlGaAs multilayer structures

Dependence of melting, roughness and contact resistances on Ge and Ni content in alloyed AuGe/Ni/Au-type electrical contacts to GaAs/AlGaAs multilayer structures

Abhilash, T S; Kumar, Ch Ravi; Sreedhar, B; Rajaram, G

期刊名称Semiconductor Science and Technology
作者Abhilash, T S; Kumar, Ch Ravi; Sreedhar, B; Rajaram, G
卷第25卷
期第3期
印刷ISSN0268-1242
电子ISSN1361-6641
文件大小458.28KB
发表时间2010-03-04
DOI10.1088/0268-1242/25/3/035002

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