Photopatternable Superhydrophobic Nanocomposites for Microfabrication
Hong, Lingfei; Pan, Tingrui
- 期刊名称Journal of Microelectromechanical Systems
- 作者Hong, Lingfei; Pan, Tingrui
- 卷第19卷
- 期第2期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小887.26KB
- 发表时间2010-04
- DOI10.1109/JMEMS.2010.2041189
- 页码246-253