Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo
- 期刊名称Applied Physics Letters
- 作者Jegert, Gunther; Kersch, Alfred; Weinreich, Wenke; SchroÌder, Uwe; Lugli, Paolo
- 卷第96卷
- 期第6期
- 印刷ISSN0003-6951
- 文件大小374.03KB
- 发表时间2010
- DOI10.1063/1.3310065
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