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Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes

Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes

Kim, Kyung Min; Lee, Sang Young; Choi, Gyu Jin; Han, Jeong Hwan; Hwang, Cheol Seong
  • 期刊名称Electrochemical and Solid-State Letters
  • 作者Kim, Kyung Min; Lee, Sang Young; Choi, Gyu Jin; Han, Jeong Hwan; Hwang, Cheol Seong
  • 卷第13卷
  • 期第1期
  • 印刷ISSN1099-0062
  • 文件大小328.32KB
  • 发表时间2010
  • DOI10.1149/1.3247971
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