Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures
- 期刊名称Sensors
- 作者Leo, Alfin; Andronenko, Sergey; Stiharu, Ion; Bhat, Rama B.
- 卷第10卷
- 期第2期
- 电子ISSN1424-8220
- 文件大小848.60KB
- 发表时间2010-02-11
- DOI10.3390/s100201338
- 页码1338-1354
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