[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity
Ray, Prasenjit; Rao, V. Ramgopal; Apte, Prakash R.
- 作者Ray, Prasenjit; Rao, V. Ramgopal; Apte, Prakash R.
- 文件大小892.72KB
- 发表时间2010
- DOI10.1109/smelec.2010.5549364
- 页码289-292