High-k HfO2–Ta2O5 mixed layers: Electrical characteristics and mechanisms of conductivity
- 作者E. Atanassova; M. Georgieva; D. Spassov; A. Paskaleva
- 卷第87卷
- 期第4期
- 印刷ISSN0167-9317
- 文件大小644.50KB
- 发表时间2010
- DOI10.1016/j.mee.2009.09.006
- 页码668-676
海量图书期刊资源，随时随地畅享阅读乐趣