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[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Design of a SOI MEMS resonant electric field sensor for power engineering applications

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Design of a SOI MEMS resonant electric field sensor for power engineering applications

Chunrong Peng, ; Pengfei Yang, ; Haiyan Zhang, ; Xin Guo, ; Shanhong Xia,

作者Chunrong Peng, ; Pengfei Yang, ; Haiyan Zhang, ; Xin Guo, ; Shanhong Xia,
文件大小559.42KB
发表时间2010
DOI10.1109/icsens.2010.5690693
页码1183-1186

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