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[IEEE 2010 Winter Simulation Conference - (WSC 2010) - Baltimore, MD, USA (2010.12.5-2010.12.8)] Proceedings of the 2010 Winter Simulation Conference - A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing

[IEEE 2010 Winter Simulation Conference - (WSC 2010) - Baltimore, MD, USA (2010.12.5-2010.12.8)] Proceedings of the 2010 Winter Simulation Conference - A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing

Klemmt, Andreas; Lange, Jan; Weigert, Gerald; Lehmann, Frank; Seyfert, Jens

作者Klemmt, Andreas; Lange, Jan; Weigert, Gerald; Lehmann, Frank; Seyfert, Jens
文件大小671.86KB
发表时间2010
DOI10.1109/wsc.2010.5678943
页码2474-2485

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