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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

NaiQi Wu, ; MengChu Zhou,

期刊名称IEEE Transactions on Automation Science and Engineering
作者NaiQi Wu, ; MengChu Zhou,
卷第7卷
期第2期
印刷ISSN1545-5955
文件大小668.76KB
发表时间2010-04
DOI10.1109/tase.2008.2008633
页码303-315

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