Fabrication of ordered nanospheres using a combination of nanoimprint lithography and controlled dewetting
Schleunitz, Arne; Spreu, Christian; Lee, JaeJong; Schift, Helmut
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Schleunitz, Arne; Spreu, Christian; Lee, JaeJong; Schift, Helmut
- 卷第28卷
- 期第6期
- 印刷ISSN1071-1023
- 文件大小702.25KB
- 发表时间2010
- DOI10.1116/1.3498762