Thermal stability comparison of TaN on HfO[sub 2] and Al[sub 2]O[sub 3]
- 期刊名称Applied Physics Letters
- 作者Kwon, Jinhee; Chabal, Yves J.
- 卷第96卷
- 期第15期
- 印刷ISSN0003-6951
- 文件大小342.14KB
- 发表时间2010
- DOI10.1063/1.3396189
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